Chemical vapor deposition of tungsten ingot Process

In WF6 and H2 as raw materials, powder metallurgy sandblasted tungsten target plate as the substrate, the open pipe by hot filament chemical vapor deposition gas flow test device, the deformable successfully prepared tungsten ingots. Experimental analysis showed that: tungsten ingot purity of 99.9%, a density greater than 19.0g/cm3, hardness of 400 ~ 500HV, has good processing plasticity. Studied the tungsten ingot microstructure and properties in the rolling deformation changes and the factors affecting its hot performance.
【Key Words】: Beijing College of Materials Science and Engineering, Key Laboratory of Functional Materials, Ministry of Education, Beijing University of Technology School of Materials Science and Engineering, Key Laboratory of Functional Materials, Ministry of Education, Beijing University of Technology School of Materials Science and Engineering, Ministry of Education Key Laboratory of Functional Materials Beijing College of Materials Science and Engineering of Ministry of Education key Laboratory of functional Materials
0 Introduction tungsten as an extremely wide range of refractory metal applications, which is mainly used for production of tungsten plate temperature standard light, tungsten evaporation boat, tube gate, heat shield, high temperature furnace components, X-ray tube tungsten target, etc. [1]. Tungsten high melting point, high temperature strength, but easily oxidized sublimation temperature brittleness, forming rather poor, so the current production of tungsten plate, the widespread use of tungsten ingot metallurgy sintering method. The due process
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